Large vacuum coater

Deposition
Yes
1
No
No
n/a
Home Built

EVA is a large vacuum coater with sample size of 3m x 0,5m. The coating take place on a metallic strip attached to a rotating drum that can be under vacuum heated to 500°C. Pressure of 10-6 mbar can be achieved within one hour. It is equiped with a magnetron cathode of 650mm width, an etching and an 250 kW electron beam (used for thick coatings and/or refractory materials like titanium).


This equipment is used by